They usually consist of a central unit that processes data (an integrated circuit chip such as microprocessor) and several components that interact with the surroundings (such as microsensors). MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm 2. MEMS ( micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts.
Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems" MEMS microcantilever resonating inside a scanning electron microscope For other uses, see MEMS (disambiguation).
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